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Service Hotline: 0510-88552263
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0510-88552263
CONTACT联系ag亚游电投
0510-88552263
TEL:86-13912392530
TEL:86-0510-88552263
MAIL:sales@whatyoulikewere.com
Add:Wuxi City, the new village Wu Qumei Jincheng Road No. 508
Fully automatic PECVD




Functional layout


Overall effect chart
1、Products overview
Low PECVD graphite boat technique on the plane is embellish technology independent research and development of photovoltaic solar cells PECVD coating production line fully automatic technique loading unloading of form a complete set of automation equipment.

1.1The main function
Low integration system, suitable for silicon solar cell production in the tubular PECVD graphite boat technique of automatic loading and unloading.
Low graphite boat and boat means has: manual lift boat, graphite boat automatic handling car boat two up and down.

1.2asic components
Low PECVD graphite boat loading and unloading machine PE - 3800 technique using staubli TX90L intelligent six axes linkage robot world leading technology, automatic basket basket system automatically, automatic collection stack coated silicon.

The machine adopts European standard steel frame structure, transparent organic glass shield; At the bottom of the frame adopts steel structure welding surface anti-corrosion treatment, with robust stability is high, staubli TX90L intelligent robot installation using reinforced independent fixed frame, to ensure the stable precision. 

2、Technical parameters
设备名称
Device name
PECVD石墨舟装卸片机
PECVD graphite boat loading and unloading machine technique
型号规格
Specifications
PE-3800
适用石墨舟
Apply the graphite boat
CT-21-240改造
CT-21-240transform
工位数量
Location number
两个石墨舟工位分别为A石墨舟工位B石墨舟工位
Two graphite boat station is A graphite boat station B graphite boat station respectively
换盒传送
In box transfer
伺服定位,自动换盒,更换片盒时设备不停机,
Servo positioning, automatic switch box, replacing disc devices do not stop,
硅片上、下料方式
Silicon wafers, blanking mode
上料方式:50/62/100片花篮上料;下料方式:堆叠收集
Feeding way: 50/62/100 slice of flower basket; Blanking: stacked collection
产能
Capacity
3800片/小时(备注:21片石墨舟)以此为准
3800 pieces per hour (note: 21 pieces of graphite boat) to shall prevail
压缩空气
Compressed air
压力:≥0.6Mpa
pressure:≥0.6Mpa
运行时间
Uptime
>98%
电源
Power
AC380V(单相三线制)/50Hz
AC380V(Single-phase three-wire system)/50Hz
整机功率
Engine power
6KW
执行系统
Perform system
史陶比尔TX90L智能机器人
Staubli TX90L intelligent robot